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Preparation of Highly T extured PZT Thin F ilms on Novel Substrates


Paper Type 
Contributed Paper
Title 
Preparation of Highly T extured PZT Thin F ilms on Novel Substrates
Author 
Cordero -Cabrer M.C.* [a], K umar R .V . [a], Evetts J.E. [a], Huehne R . [b], K ursumovic A. [a] an
Email 
mcc40@cam.ac.uk
Abstract:
Preparation of thin PZT films on different substrates is reported in this paper. PbZr0.52Ti0.48O sol precursor was used to prepare thin films by dip coating on the following substrates: alumina discs, sapphire plates (planes R and C), and textured foils of Ni/NiO and Ni/NiO/BaZrO3 ,Films were characterised in chemical and phase composition, microstructure. thickness and texture. It was found that PZT was obtained in all cases, with microstructure highly dependent upon the substrate, and thickness of approximately 100-150 nm as seen by SEM. Films on alumina showed a random orientation; sapphire and Ni-NiO presented some degree of texture and Ni-NiO-BaZrO3 showed highly textured films. A comparison of highly textured PZT in Ni-NiO-BaZrO3 by slow heating and rapid thermal annealing also showed similar degree of texture. In summary, a new line of research is proposed by showing that highly textured PZT thin films can be prepared by dip coating on novel substrates.
Start & End Page 
279 - 285
Received Date 
Revised Date 
Accepted Date 
Full Text 
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Keyword 
metal electrodes, PZT, sol-gel, texture
Volume 
Vol.32 No.3 (SEPTEMBER 2005)
DOI 
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