Preparation  of  Highly  T extured  PZT  Thin  F ilms  on
Novel  Substrates

Cordero -Cabrer M.C. [a]; K umar R .V . [a]; Evetts J.E. [a]; Huehne R . [b]; K ursumovic A. [a] an

Preparation of Highly T extured PZT Thin F ilms on Novel Substrates

Cordero -Cabrer M.C.* [a], K umar R .V . [a], Evetts J.E. [a], Huehne R . [b], K ursumovic A. [a] an
* Author for corresponding; e-mail address: mcc40@cam.ac.uk
Volume: Vol.32 No.3 (SEPTEMBER 2005)
Research Article
DOI:
Received: -, Revised: -, Accepted: -, Published: -

Citation: M.c. C.-., . K.U.R..., J.e. E., . H.R. and An K.U.A.., Preparation of Highly T extured PZT Thin F ilms on Novel Substrates, Chiang Mai Journal of Science, 2005; 32(3): 279-285.

Abstract

Preparation of thin PZT films on different substrates is reported in this paper. PbZr_0.52Ti_0.48O₃ sol precursor was used to prepare thin films by dip coating on the following substrates: alumina discs, sapphire plates (planes R and C), and textured foils of Ni/NiO and Ni/NiO/BaZrO₃ ,Films were characterised in chemical and phase composition, microstructure. thickness and texture. It was found that PZT was obtained in all cases, with microstructure highly dependent upon the substrate, and thickness of approximately 100-150 nm as seen by SEM. Films on alumina showed a random orientation; sapphire and Ni-NiO presented some degree of texture and Ni-NiO-BaZrO₃ showed highly textured films. A comparison of highly textured PZT in Ni-NiO-BaZrO₃ by slow heating and rapid thermal annealing also showed similar degree of texture. In summary, a new line of research is proposed by showing that highly textured PZT thin films can be prepared by dip coating on novel substrates.

Keywords: metal electrodes, PZT, sol-gel, texture

Chiang Mai Journal of Science

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