Chiang Mai Journal of Science

High Optical Transmittance of Indium Tin Oxide Nanorods Prepared by Electron Beam Evaporation with Glancing Angle Deposition Technique

Paper Type	Contributed Paper
Title	High Optical Transmittance of Indium Tin Oxide Nanorods Prepared by Electron Beam Evaporation with Glancing Angle Deposition Technique
Author	Bhumin Yosvichit [a], Nontakoch Siriphongsapak [a], Mati Horprathum [b], Pitak Eiamchai [b], Viyapol Patthanasettakul [b], Saksorn Limwichean [b], Pongpan Chindaudom [b], Chaiyan Oros [c] and Somyod Denchitcharoen*[a]
Email	led_material@hotmail.com
Abstract:  In this work, indium tin oxide (ITO) nanorods were deposited on glass slides without ITO dense layers by electron beam evaporation. To fabricate the ITO nanorods, the glancing angle deposition (GLAD) technique was introduced with different rotating speeds from 10 to 50 rpm. The grown nanorod layer was investigated by x-ray diffraction (XRD) to study the film quality. Field emission scanning electron microscope (FE-SEM) was used to evaluate the surface morphology with geometry and dimension of nanorods relating to the rotating speed. A UV-Vis spectrophotometer was used for the optical transmittance and it was found that the nanorod morphology had improved to obtain higher transmittance of ITO layers. Furthermore, the rotating speed of the substrate at a fixed angle of 85° also enhanced the transmittance of a nanorod film. The transmittance percentage of ITO nanorods grown on the glass slide is 92% at the wavelength of 550 nm, which is much higher than that of only the ITO dense layer.
Start & End Page	271 - 275
Received Date	2015-09-15
Revised Date
Accepted Date	2015-11-14
Full Text	Download
Keyword	ITO nanorods, glancing angle deposition, electron beam evaporation
Volume	Vol.43 No.2 (SPECIAL ISSUE 1)
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