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Spectroscopic electron temperature measurement in methane/helium plasma during diamond-like carbon coating


Paper Type 
 Contributed Paper
Title 
 Spectroscopic electron temperature measurement in methane/helium plasma during diamond-like carbon coating
Author 
 Artit Chingsungnoen , Vittaya Amornkitbamrung
Email 
 artit.c@msu.ac.th
Abstract:

 The electron temperature () was extracted from the capacitively-coupled radio frequency (CCRF) plasma reactor by the spectral line intensity ratio method. The measured intensity ratio of 587.6/706.5 nm from CH4/He plasma was used to calculate the electron temperature under the steady state corona (SSC) approximation. Results were in good agreement with Langmuir probe measurement. This analysis method was then used to determine the electron temperature profile of CH4/He plasma. The increase in power density from ~980 to ~1715 mW/cm2 resulted in a decrease in the electron temperature from ~0.93 eV to ~0.65 eV. The highest electron temperature appeared at the discharge radial center and ~4 mm from the RF powered electrode. From the radial electron temperature measurement, the temperature gradient inside the discharge region tended to decrease with the increase in power density, while in the axial direction, the electron temperature changed sharply near the powered electrode.
Start & End Page 
 248 - 257
Received Date 
 2013-08-21
Revised Date 
Accepted Date 
 2014-01-29
Full Text 
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Keyword 
 electron temperature, CCRF reactor, steady state corona approximatio
Volume 
 Vol.42 No.1 (JANUARY 2015)
DOI 
Citation 
 Chingsungnoen A. and Amornkitbamrung V., Spectroscopic electron temperature measurement in methane/helium plasma during diamond-like carbon coating, Chiang Mai Journal of Science, 2015; 42(1): 248-257.
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