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A Tapered Glass Microcapillary Processing System for Focusing a MeV H+ Ion Beam


Paper Type 
Contributed Paper
Title 
A Tapered Glass Microcapillary Processing System for Focusing a MeV H+ Ion Beam
Author 
Somrit Unai*[a,b], Michael W. Rhodes [b], Chanvit Sriprom [b], Kanda Singkarat [b,c], Nirut Pussad
Email 
somritu@fnrf.science.cmu.ac.th
Abstract:

Several recent reports have indicated that a tapered glass capillary tube with a tip size on the order of micrometers has a focusing effect on transmitted ion beams. In relation to our particular area of interest, this could be a simple and cheap way to generate a focused ion beam for ion beam lithography and beam-in-air analysis and irradiation applications. Here, details of the method and the equipment used to produce a tapered glass microcapillary tube will be described. The equipment, which is simply called a “glass microcapillary puller”, is made using an induction heater. This method ensures that the glass tube, which is inserted inside and along the central axis of the solenoid, is heated uniformly in all directions. The heating temperature is adjusted by a power control, with a maximum temperature of approximately 2,000 oC. The pulling tension is varied over a wide range by using different weights. Application of the tapered glass microcapillary for 2 MeV H+ ion beam lithography is also demonstrated.

Start & End Page 
789 - 797
Received Date 
2012-09-17
Revised Date 
Accepted Date 
2013-03-14
Full Text 
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Keyword 
focusing effect, glass puller, induction heater, ion beam lithography, tapered glass capillary
Volume 
Vol.40 No.4 (OCTOBER 2013)
DOI 
Citation 
Unai S., Rhodes M.W., Sriprom C., Singkarat K. and Pussad N., A Tapered Glass Microcapillary Processing System for Focusing a MeV H+ Ion Beam, Chiang Mai J. Sci., 2013; 40(4): 789-797.
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Chiang Mai Journal of Science

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