Chiang Mai Journal of Science

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Monomorph actuators, fabricated using electrophoretic deposition (EPD), were investigated in this paper. Three systems, 2-, 4- and 6-layer, were fabricated. Using EPD, monomorph with miniaturized dimension can be fabricated. The monomorph was first characterized in structural properties. Perovskite structures were observed in all the three systems from XRD patterns. The gradient change in microstructure can be found over the cross sections from the SEM photographs. The electromechanical properties were also studied. The displacement variation as a function of number of layers and frequency were examined. A model based on Euler beam theory was proposed to describe the vibration behavior of the monomorph. It is found that in the static case, the 2-layer system generates largest displacement under the same conditions, followed by 4- and 6-layer systems. In the resonance state, the similar trend was also observed.

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