Gas Sensing Properties of WO 3 Thin and Thick Films Prepared by Different T echniques
Sriyudthsak M. [a], Comini E. [b], F aglia G. [b], Wlodarski W . [c], Supothina S. [d], and Sberveg* Author for corresponding; e-mail address: comini@ing.unibs.it
Volume :Vol.32 No.3 (SEPTEMBER 2005)
Research Article
DOI:
Received: -, Revised: -, Accepted: -, Published: -
Citation: M. S., E. C., G. F.A., . W.W., S. S. and Sberveg A., Gas Sensing Properties of WO 3 Thin and Thick Films Prepared by Different T echniques, Chiang Mai Journal of Science, 2005; 32(3): 261-266.
Abstract
Tungsten trioxide (WO3) thin films are promising candidate sensing applications. This paper presents the sensing properties of WO3 films prepared by different techniques, namely, r.f.. sputtering and precipitation technique. Attention has been focused on the influence on the preparation technique to th sensing properties of the material. All the films were deposited onto alumina substrates with fabricated Pt-film interdigital electrodes on front-side and a Ptfilm heater on the back-side to perform electrical measurements in controlled atmosphere and temperature. The results showed that thin and thick films are very sensitive NO2, the thin films are faster in response and recovery while the thick films have higher response value at lower operating temperatures.