Chiang Mai Journal of Science

Print ISSN: 0125-2526 | eISSN : 2465-3845

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Influence of Vacuum Annealing Temperature on Structural, Optical and Electrical of Nanocolumnar AZO Films for TCO Application

Kittikhun Seawsakul, Mati Horprathum*, Pitak Eiamchai , Viyapol Pattantsetakul, Saksorn Limwichean, Chanunthorn Chananonnawathorn, Pennapa Muthitamongkol, Chanchana Thanachayanont, Annop Klamchuen, Tuksadon Wutikhun, Hideki Nakajima, Miskawan Sripakdee and Prayoon Songsiriritthigul*
* Author for corresponding; e-mail address: mati.horprathum@nectec.or.th
Volume: Vol.47 No.4 (Special Issue II : July 2020)
Research Article
DOI:
Received: 24 July 2019, Revised: -, Accepted: 15 January 2020, Published: -

Citation: Seawsakul K., Horprathum M., Eiamchai P., Pattantsetakul V., Limwichean S., Chananonnawathorn C., et al., Influence of Vacuum Annealing Temperature on Structural, Optical and Electrical of Nanocolumnar AZO Films for TCO Application, Chiang Mai Journal of Science, 2020; 47(4): 815-822.

Abstract

In this work, the nanocolumnar AZO thin film was deposited on glass slide and silicon wafer (100) substrate by dc pulsed magnetron sputtering with glancing angle deposition (GLAD) technique on the silicon (100) wafer and glass slide substrate. The influences of annealing treatment on the nanocolumnar AZO thin films prepared in different temperature at 200 – 400 °C for 3 hours in vacuum were investigated. The physical morphologies, optical and electrical properties of the vertically aligned nanocolumnar AZO thin films were investigated using grazing incident X-ray diffraction (GIXRD), field-emission scanning electron microscope (FE-SEM), transmission electron microscope (TEM), UV-Vis-NIR spectrophotometer with angle-dependent technique and Hall-effect measurement. The crystal structure analysis from GIXRD indicated that as-deposited and annealed nanocolumnar AZO films were crystalline with wurtzite structure. In addition, the results show that the optimum annealed temperature of 400 °C was the most valuable to improve the optical transmission in visible region (86.6%) with omnidirectional anti-reflection property and low resistivity (1.70×10-3 Ω·cm) of nanocolumnar AZO films.

Keywords: AZO, pulsed dc magnetron sputtering, GLAD, vacuum annealing

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